Design and Characterization of a CMOS MEMS Capacitive...

IEEE Sensors Journal 2016 / 3 Vol. 16; Iss. 5

Design and Characterization of a CMOS MEMS Capacitive Oscillator for Resonant Sensing in Liquids

Chiang, Che-Hao, Chou, Mu-Chi, Hsieh, Ping-Hsuan, Lu, Michael S.-C.
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Volume:
16
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2015.2499256
Date:
March, 2016
File:
PDF, 1.86 MB
english, 2016
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