Layout pattern analysis using the Voronoi diagram of line segments
Dey, Sandeep Kumar, Cheilaris, Panagiotis, Gabrani, Maria, Papadopoulou, EvanthiaVolume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.15.1.013504
Date:
February, 2016
File:
PDF, 1003 KB
english, 2016