Impact of a deformed extreme ultraviolet pellicle in terms...

Journal of Micro/Nanolithography MEMS and MOEMS 2016 / 01 Vol. 15; Iss. 2

Impact of a deformed extreme ultraviolet pellicle in terms of the critical dimension uniformity

Kim, In-Seon, Yeung, Michael, Barouch, Eytan, Oh, Hye-Keun
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Volume:
15
Language:
english
Journal:
Journal of Micro/Nanolithography, MEMS, and MOEMS
DOI:
10.1117/1.JMM.15.2.021003
Date:
January, 2016
File:
PDF, 3.27 MB
english, 2016
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