Effect of molecular structure of alcohols on wet...

Sensors and Actuators A: Physical 2016 / 05 Vol. 242

Effect of molecular structure of alcohols on wet anisotropic etching of silicon

Rola, Krzysztof P., Zubel, Irena
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Volume:
242
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2016.02.032
Date:
May, 2016
File:
PDF, 1.60 MB
english, 2016
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