SPIE Proceedings [SPIE SPIE Optifab - Rochester, New York, United States (Monday 12 October 2015)] Optifab 2015 - Deterministic polishing from theory to practice
Bentley, Julie L., Stoebenau, Sebastian, Hooper, Abigail R., Hoffmann, Nathan N., Sarkas, Harry W., Escolas, John, Hobbs, ZacharyVolume:
9633
Year:
2015
Language:
english
DOI:
10.1117/12.2196055
File:
PDF, 813 KB
english, 2015