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SPIE Proceedings [SPIE Photonics Europe - Strasbourg, France (Monday 3 April 2006)] Optical Micro- and Nanometrology in Microsystems Technology - Pulsed-force mode AFM characterization of photopatterned polymer films for holographic data storage application
Soppera, Olivier, Jradi, Safi, Carre, Christiane, Lougnot, Daniel, Gorecki, Christophe, Asundi, Anand K., Osten, WolfgangVolume:
6188
Year:
2006
Language:
english
DOI:
10.1117/12.663251
File:
PDF, 455 KB
english, 2006