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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, USA (Saturday 21 January 2012)] MEMS Adaptive Optics VI - MEMS deformable mirror actuators with enhanced reliability
Cornelissen, S. A., Bifano, T. G., Bierden, P. A., Olivier, Scot S., Bifano, Thomas G., Kubby, JoelVolume:
8253
Year:
2012
Language:
english
DOI:
10.1117/12.910742
File:
PDF, 2.01 MB
english, 2012