Effects of temperature on PO and resistivity of ScAlN film

Surface Engineering 2015 / 10 Vol. 31; Iss. 10

Effects of temperature on PO and resistivity of ScAlN film

Yang, YX., Li, XM., Zhou, D., Yang, CT., Feng, F., Yang, JS., Hu, QJ.
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Volume:
31
Language:
english
Journal:
Surface Engineering
DOI:
10.1179/1743294415y.0000000040
Date:
October, 2015
File:
PDF, 302 KB
english, 2015
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