SPIE Proceedings [SPIE Photonics Fabrication Europe - Brugge, Belgium (Monday 28 October 2002)] Integrated Optical Devices: Fabrication and Testing - Matrix-distributed ECR-PECVD for high-rate deposition of silica for applications in integrated optics
Girard, Gregory, Danieka, Dmitri, Bulkin, Pavel, Bouree, Jean-Eric, Righini, Giancarlo C.Volume:
4944
Year:
2003
Language:
english
DOI:
10.1117/12.468294
File:
PDF, 187 KB
english, 2003