[IEEE 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Montpellier, France (2015.4.27-2015.4.30)] 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) - Constant frequency drive method for MEMS for improved failure detection
Jamborhazi, Szilard, Rencz, MartaYear:
2015
Language:
english
DOI:
10.1109/DTIP.2015.7161038
File:
PDF, 829 KB
english, 2015