SPIE Proceedings [SPIE International Symposium on Photoelectronic Detection and Imaging 2011 - Beijing, China (Tuesday 24 May 2011)] International Symposium on Photoelectronic Detection and Imaging 2011: Sensor and Micromachined Optical Device Technologies - Lateral comb-drive MEMS structure for micro-measuring probe application
Sun, Fengming, Gao, Sai, Fu, Xing, Brand, Uwe, Herrmann, Konrad, Wang, Yuelin, Xie, Huikai, Jin, YufengVolume:
8191
Year:
2011
Language:
english
DOI:
10.1117/12.900706
File:
PDF, 1013 KB
english, 2011