Post-fab melt perfects microchip details: Nanofabrication

Post-fab melt perfects microchip details: Nanofabrication

Paula Gould
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Volume:
3
Year:
2008
Language:
english
DOI:
10.1016/s1748-0132(08)70035-5
File:
PDF, 102 KB
english, 2008
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