Improvement of the short channel effect in PMOSFETs using cold implantation
Lee, Suk Hun, Park, Se Geun, Jeong, Seong Hoon, Jung, Hyuck-Chai, Kim, Il Gweon, Kang, Dong-Ho, Nam, Hyo-Jik, Kim, Dae Jung, Lee, Kyu Pil, Choi, Joo Sun, Jung, Woosuk, Park, Yongkook, Choi, Changhwan,Language:
english
Journal:
Materials Research Bulletin
DOI:
10.1016/j.materresbull.2016.02.027
Date:
February, 2016
File:
PDF, 1.15 MB
english, 2016