High-speed high-resolution heterodyne interferometer using a laser with low beat frequency
Diao, Xiaofei, Hu, Pengcheng, Xue, Zi, Kang, YanhuiVolume:
55
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.55.000110
Date:
January, 2016
File:
PDF, 1.18 MB
english, 2016