Electrostatic Generation of Bulk Acoustic Waves and Electrical Parameters of Si-MEMS Resonators
Dulmet, Bernard, Ivan, Mihaela Eugenia, Ballandras, SylvainVolume:
63
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
DOI:
10.1109/TUFFC.2015.2504485
Date:
February, 2016
File:
PDF, 2.00 MB
english, 2016