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Low Frequency Measurements Using Piezoresistive Cantilever MEMS Devices – The Problem of Thermal Drift
Jóźwiak, Grzegorz, Kopiec, Daniel, Gotszalk, Teodor, Grabiec, Piotr, Rangelow, IvoVolume:
87
Year:
2014
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2014.11.414
File:
PDF, 597 KB
english, 2014