Effects of Annealing Temperature on Parylene-C Films Formed by Chemical Vapor Condensation Method
Kim, Hong Tak, Kim, Chang-Duk, Lee, Sung-Youp, Sohn, Young-SooVolume:
618
Language:
english
Journal:
Molecular Crystals and Liquid Crystals
DOI:
10.1080/15421406.2015.1076330
Date:
September, 2015
File:
PDF, 632 KB
english, 2015