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[IEEE 2014 20th International Conference on Ion Implantation Technology (IIT) - Portland, OR, USA (2014.6.26-2014.7.4)] 2014 20th International Conference on Ion Implantation Technology (IIT) - Solar cells doping by beam line and plasma immersion ion implantation
Coig, M., Milesi, F., Payen, N., Reboh, S., Mazen, F., Lanterne, A., Le Perchec, J., Gall, S., Veschetti, Y.Year:
2014
Language:
english
DOI:
10.1109/IIT.2014.6939976
File:
PDF, 450 KB
english, 2014