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SPIE Proceedings [SPIE Applied Optics and Photonics China (AOPC2015) - Beijing, China (Tuesday 5 May 2015)] AOPC 2015: Micro/Nano Optical Manufacturing Technologies; and Laser Processing and Rapid Prototyping Techniques - Size effect study of thin film hardness using AFM nano-indentation
Li, Lin, Hong, Minghui, Jiang, Lan, Xu, Linyan, Qian, Shuangbei, Li, Juan, Liu, Congcong, Guo, Shijia, Huang, Di, Wu, Sen, Hu, XiaodongVolume:
9673
Year:
2015
Language:
english
DOI:
10.1117/12.2197572
File:
PDF, 351 KB
english, 2015