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SPIE Proceedings [SPIE Optical Engineering + Applications - San Diego, CA (Sunday 26 August 2007)] Optical Manufacturing and Testing VII - A quantitative comparison of three grolishing techniques for the Precessions process

Walker, D. D., Baldwin, A., Evans, R., Freeman, R., Hamidi, S., Shore, P., Tonnellier, X., Wei, S., Williams, C., Yu, G., Burge, James H., Faehnle, Oliver W., Williamson, Ray
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Volume:
6671
Year:
2007
Language:
english
DOI:
10.1117/12.735488
File:
PDF, 2.21 MB
english, 2007
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