Low dielectric constant materials in microand...

Ученые записки Забайкальского государственного университета. Серия: Физика, математика, техника, технология 2011 Iss. 3

Low dielectric constant materials in microand nanoelectronics

Arkhincheev Valeriy Yefimovich,Baklanov Mikhail Rodionovich
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Year:
2011
Language:
russian
Journal:
Ученые записки Забайкальского государственного университета. Серия: Физика, математика, техника, технология
DOI:
10.0000/cyberleninka.ru/article/n/low-dielectric-constant-materials-in-microand-nanoelectronics
File:
PDF, 591 KB
russian, 2011
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