Preparation of siloxane–silsesquioxane hybrid thin films for large-scale-integration interlayer dielectrics with excellent mechanical properties and low dielectric constants
Jin-Heong Yim, Yi-Yeol Lyu, Hyun-Dam Jeong, Sang Kook Mah, Jingyu Hyeon-Lee, Jun-Hee Hahn, Gwang Seok Kim, Seok Chang, Jae-Geun ParkVolume:
90
Year:
2003
Language:
english
Pages:
9
DOI:
10.1002/app.12591
File:
PDF, 138 KB
english, 2003