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RF sputter deposition of poly(tetrafluoroethylene) films as masking materials for silicon micromachining
Dhananjay S. Bodas, Sheetal J. Patil, A. B. Mandale, S. A. GangalVolume:
91
Year:
2004
Language:
english
Pages:
10
DOI:
10.1002/app.13191
File:
PDF, 117 KB
english, 2004