Effect of filament temperature on the chemical vapor deposition of fluorocarbon–organosilicon copolymers
Shashi K. Murthy, Bradley D. Olsen, Karen K. GleasonVolume:
91
Year:
2004
Language:
english
Pages:
10
DOI:
10.1002/app.13342
File:
PDF, 178 KB
english, 2004