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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Micromachined Devices and Components III - SPICE Modeling of polysilicon thermal actuators
Butler, Jeffrey T., Bright, Victor M., Cowan, William D., Chau, Kevin H., French, Patrick J.Volume:
3224
Year:
1997
Language:
english
DOI:
10.1117/12.284526
File:
PDF, 1.07 MB
english, 1997