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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Microfluidic Devices and Systems II - Integratible process for fabrication of fluidic microduct networks on a single wafer
Matzke, Carolyn M., Ashby, Carol I. H., Bridges, Monica M., Griego, Leonardo, Wong, C. Channy, Ahn, Chong H., Frazier, A. BrunoVolume:
3877
Year:
1999
Language:
english
DOI:
10.1117/12.359328
File:
PDF, 2.64 MB
english, 1999