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SPIE Proceedings [SPIE Symposium on Micromachining and Microfabrication - Santa Clara, CA (Monday 20 September 1999)] Microfluidic Devices and Systems II - Generation of large-area microscale manifolds using excimer laser ablation

Zhou, Simon, Kilgo III, Marvin M., Williams, Charles N., Ahn, Chong H., Frazier, A. Bruno
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Volume:
3877
Year:
1999
Language:
english
DOI:
10.1117/12.359342
File:
PDF, 3.14 MB
english, 1999
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