SPIE Proceedings [SPIE Photonics Asia 2007 - Beijing, China (Sunday 11 November 2007)] MEMS/MOEMS Technologies and Applications III - Front Matter: Volume 6836
SPIE, Proceedings of, Chiao, Jung-Chih, Chen, Xuyuan, Zhou, Zhaoying, Li, XinxinVolume:
6836
Year:
2007
Language:
english
DOI:
10.1117/12.785147
File:
PDF, 345 KB
english, 2007