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Sn migration control at high temperature due to high deposition speed for forming high-quality GeSn layer
Taoka, Noriyuki, Capellini, Giovanni, von den Driesch, Nils, Buca, Dan, Zaumseil, Peter, Schubert, Markus Andreas, Klesse, Wolfgang Matthias, Montanari, Michele, Schroeder, ThomasVolume:
9
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.9.031201
Date:
March, 2016
File:
PDF, 1.71 MB
english, 2016