The role of silane gas flow rate on PECVD-assisted...

Applied Physics 2016 / 3 Vol. 122; Iss. 3

The role of silane gas flow rate on PECVD-assisted fabrication of silicon nanowires

Hamidinezhad, Habib, Ashkarran, Ali Akbar, Abdul-Malek, Zulkurnain
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Volume:
122
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-016-9713-7
Date:
March, 2016
File:
PDF, 1.94 MB
english, 2016
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