SPIE Proceedings [SPIE SPIE Europe Microtechnologies for the New Millennium - Dresden, Germany (Monday 4 May 2009)] Smart Sensors, Actuators, and MEMS IV - Comparison between AlN thin films with different crystal orientations for MEMS applications
Ababneh, A., Schmid, Ulrich, Marchand, G., Seidel, H., Hernando, J., Sánchez-Rojas, J. L., Sökmen, Ü., Peiner, E., Schmid, U.Volume:
7362
Year:
2009
Language:
english
DOI:
10.1117/12.821858
File:
PDF, 715 KB
english, 2009