Microstructure and Electrical Property of TiNx Films...

Journal of Nanoscience and Nanotechnology 2012 / 02 Vol. 12; Iss. 2

Microstructure and Electrical Property of TiNx Films Deposited by DC Reactive Magnetron Sputtering Superimposed Electromagnetic Field System

Park, Ji Bong, Kim, Jung Hyuk, Cho, Sang Hyun, Kang, Chung Gil, Song, Pung Keun
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Volume:
12
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2012.4600
Date:
February, 2012
File:
PDF, 819 KB
english, 2012
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