CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis
Banerji, Saoni, Michalik, Piotr, Fernández, Daniel, Madrenas, Jordi, Mola, Albert, Montanyà, JosepLanguage:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2878-3
Date:
February, 2016
File:
PDF, 1.87 MB
english, 2016