CMOS-MEMS resonant pressure sensors: optimization and...

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CMOS-MEMS resonant pressure sensors: optimization and validation through comparative analysis

Banerji, Saoni, Michalik, Piotr, Fernández, Daniel, Madrenas, Jordi, Mola, Albert, Montanyà, Josep
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Language:
english
Journal:
Microsystem Technologies
DOI:
10.1007/s00542-016-2878-3
Date:
February, 2016
File:
PDF, 1.87 MB
english, 2016
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