[IEEE 2015 International 3D Systems Integration Conference...

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[IEEE 2015 International 3D Systems Integration Conference (3DIC) - Sendai, Japan (2015.8.31-2015.9.2)] 2015 International 3D Systems Integration Conference (3DIC) - Transfer and non-transfer stacking technologies based on chip-to-wafer self-asembly for high-throughput and high-precision alignment and microbump bonding

Fukushima, Takafumi, Suzuki, Taku, Hashiguchi, Hideto, Nagai, Chisato, Bea, Jichoel, Hashimoto, Hiroyuki, Murugesan, Mariappan, Lee, Kang-Wook, Tanaka, Tetsu, Asami, Kazushi, Kitamura, Yasuhiro, Koyan
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Year:
2015
Language:
english
DOI:
10.1109/3DIC.2015.7334578
File:
PDF, 821 KB
english, 2015
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