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[IEEE 2015 IEEE SENSORS - Busan, South Korea (2015.11.1-2015.11.4)] 2015 IEEE SENSORS - Transduction performance of piezoresistive silicon nanowires on the frequency resolution of a resonant MEMS sensor
Lehee, Guillaume, Souchon, Frederic, Riou, Jean-Christophe, Bosseboeuf, Alain, Jourdan, GuillaumeYear:
2015
Language:
english
DOI:
10.1109/ICSENS.2015.7370337
File:
PDF, 809 KB
english, 2015