Sidewall Adhesion Evolution in Epitaxial Polysilicon as a...

Journal of Microelectromechanical Systems 2016 / 2 Vol. 25; Iss. 1

Sidewall Adhesion Evolution in Epitaxial Polysilicon as a Function of Impact Kinetic Energy and Stopper Area

Dellea, S., Ardito, R., De Masi, B., Tocchio, A., Rizzini, F., Langfelder, G.
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Volume:
25
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2490481
Date:
February, 2016
File:
PDF, 2.81 MB
english, 2016
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