SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Nanofabrication Technologies - Fine gold grating fabrication on glass plate by imprint lithography
Hirai, Yoshihiko, Ushiro, Toshihiko, Kanakugi, Tomohiro, Matsuura, Takashi, Dobisz, Elizabeth A.Volume:
5220
Year:
2003
Language:
english
DOI:
10.1117/12.505408
File:
PDF, 554 KB
english, 2003