SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Microfluidics, BioMEMS, and Medical Microsystems III - Diode laser bonding of planar microfluidic devices, MOEMS, bioMEMS, diagnostic chips, and microarrays
Chen, Jie-Wei, Zybko, Jerry M., Papautsky, Ian, Chartier, IsabelleVolume:
5718
Year:
2005
Language:
english
DOI:
10.1117/12.609874
File:
PDF, 1.46 MB
english, 2005