Wide Range and Accurate Measurement of Wafer Thickness Gauge Using Optical Spectral Analyzer
Onuki, Teppei, Ebina, Yutaro, Ojima, Hirotaka, Shimizu, Jun, Zhou, LiboVolume:
1136
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.1136.581
Date:
January, 2016
File:
PDF, 1.18 MB
english, 2016