SPIE Proceedings [SPIE SPIE Optical Metrology - Munich, Germany (Sunday 21 June 2015)] Optical Measurement Systems for Industrial Inspection IX - Ultra-precision optical metrology using highly controlled fiber-based frequency combs
Lehmann, Peter, Osten, Wolfgang, Albertazzi Gonçalves, Armando, Minoshima, Kaoru, Nakajima, Yoshiaki, Wu, GuanhaoVolume:
9525
Year:
2015
Language:
english
DOI:
10.1117/12.2191131
File:
PDF, 458 KB
english, 2015