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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Optical Measurement Systems for Industrial Inspection IV - Confocal micro-optical distance sensor: principle and design
Ruprecht, Aiko K., Pruss, Christof, Tiziani, Hans J., Osten, Wolfgang, Lucke, Peter, Last, Arndt, Mohr, Jurgen, Lehmann, Peter, Osten, Wolfgang, Gorecki, Christophe, Novak, Erik L.Volume:
5856
Year:
2005
Language:
english
DOI:
10.1117/12.612008
File:
PDF, 570 KB
english, 2005