Optical characterization of gaps in directly bonded Si compound optics using infrared spectroscopy
Gully-Santiago, Michael, Jaffe, Daniel T., White, VictorVolume:
54
Language:
english
Journal:
Applied Optics
DOI:
10.1364/AO.54.010177
Date:
December, 2015
File:
PDF, 1.60 MB
english, 2015