Pre-oxidation of AlN substrates for subsequent metallization
Yeh, Chun-Ting, Tuan, Wei-HsingVolume:
26
Language:
english
Journal:
Journal of Materials Science: Materials in Electronics
DOI:
10.1007/s10854-015-3160-7
Date:
August, 2015
File:
PDF, 1.52 MB
english, 2015