![](/img/cover-not-exists.png)
Study of the surface of GaAs after etching in high-frequency and glow discharge plasma by atomic force microscopy
Dunaev, A. V., Murin, D. B., Pivovarenok, S. A.Volume:
50
Language:
english
Journal:
Semiconductors
DOI:
10.1134/S106378261602007X
Date:
February, 2016
File:
PDF, 492 KB
english, 2016