A study on phase transformation of SnOx thin films prepared...

Materials Science in Semiconductor Processing 2016 / 05 Vol. 46

A study on phase transformation of SnOx thin films prepared by reactive magnetron sputtering

Guo, Li, Zhao, Ming, Zhuang, Daming, Gong, Qianming, Tan, Hao, Cao, Mingjie, Ouyang, Liangqi
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Volume:
46
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2015.10.008
Date:
May, 2016
File:
PDF, 1.10 MB
english, 2016
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