Electrical Characterization of Ultrathin RF-Sputtered LiPON...

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ACS Applied Materials & Interfaces 2016 / 03

Electrical Characterization of Ultrathin RF-Sputtered LiPON Layers for Nanoscale Batteries

Put, Brecht, Vereecken, Philippe M., Meersschaut, Johan, Sepúlveda, Alfonso, Stesmans, Andre
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/acsami.5b12500
Date:
March, 2016
File:
PDF, 1.41 MB
english, 2016
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