![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Microlithography 2004 - Santa Clara, CA (Sunday 22 February 2004)] Emerging Lithographic Technologies VIII - Microsystems manufacturing via embossing of photodefinable thermally sacrificial materials
White, Celesta E., Anderson, Travis, Henderson, Clifford L., Rowland, Harry D., King, William P., Mackay, R. ScottVolume:
5374
Year:
2004
Language:
english
DOI:
10.1117/12.536277
File:
PDF, 566 KB
english, 2004