SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] Microfluidics, BioMEMS, and Medical Microsystems III - Rapid processing of replication tools with high-aspect-ratio microchannels for microfluidics
Jurischka, Reinhold, Blattert, Christoph, Tahhan, Isam, Mueller, Claas, Schoth, Andreas, Menz, Wolfgang, Papautsky, Ian, Chartier, IsabelleVolume:
5718
Year:
2005
Language:
english
DOI:
10.1117/12.590549
File:
PDF, 988 KB
english, 2005