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High Quality Al-Polar AlN Growth on (0001) Sapphire Using Polarity-Selective Thermal Etching by High Temperature Metalorganic Chemical Vapor Deposition
Jeon, Minhwan, Kim, Jinwan, Lee, Kyungjae, Eom, Daeyong, Pyeon, Jaedo, Heo, Cheon, Nam, OkhyunVolume:
15
Language:
english
Journal:
Journal of Nanoscience and Nanotechnology
DOI:
10.1166/jnn.2015.11446
Date:
November, 2015
File:
PDF, 731 KB
english, 2015