Generation of Regular Pore System in Silicon by Means of...

Key Engineering Materials 2016 / 2 Vol. 683

Generation of Regular Pore System in Silicon by Means of Nanoindentation

Dmitrievskiy, Alexander A., Guseva, Darya G., Efremova, Nadezhda Yu., Stolyarov, Roman A.
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Volume:
683
Language:
english
Journal:
Key Engineering Materials
DOI:
10.4028/www.scientific.net/KEM.683.131
Date:
February, 2016
File:
PDF, 838 KB
english, 2016
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